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Product information

C30MVR

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Electrical requirements (ACV×φ×Hz) 200×3×50
220×3×60
Power (KW)(50/60Hz) 5.0/6.0
Cooling method Water flow rate (L/min)(20℃) 5.5
Weight (Kg) 131
Adsober replacement cycle 24,000 hours

*C30MVR run multiple cryopumps.
*Cooling water inlet/outlet Rc 3/8

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