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Product information
CRYOPUMPS (STANDARD) 10" TYPE
CRYO-U10H
FEATURES
- Running costs can be lowered by multiple operation (two units)
- For experimental equipments and medium-size production facilities.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 2,400 |
| Hydrogen | 3,600 | ||
| Argon | 2,000 | ||
| Water | 6,900 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 8.0×102(6.0) |
| Hydrogen | 1.5×102(1.1) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.8×105) |
| Hydrogen | 6.7×105(5.0×103) | ||
| Cooldown time | min(Hz) | 110/100(50/60) | |
| Mounting flange | UVG-250 | ||
| Compressor unit | C15R | ||
| Weight of cryopump | kg | 29.0 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
Inquiries about Products
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