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CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22WB
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds (20degrees)(20℃) | Nitrogen | L/s | 13,000 |
| Hydrogen | 16,500 | ||
| Argon | 11,000 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 3.5×103(26) |
| Hydrogen | 1.3×103(9.6) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 8.1×108(6.1×106) |
| Hydrogen | 8.5×106(6.4×104) | ||
| Cooldown time | min(Hz) | 165/150(50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30PMVRT×1 | ||
| Weight of cryopump | Kg | 125.0 | |
*Maintenance interval: every 16,000 hours
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