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Product information
CRYOPUMPS (STANDARD) 6" TYPE
CRYO-U6H
FEATURES
- Light-weight and compact. Our smallest standard product.
- Suitable for small vacuum systems in the laboratory.
- Multiple operation (up to 3 units)
- Ultra-high vacuum (10-8Pa or lower)
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 750 |
| Hydrogen | 1,100 | ||
| Argon | 620 | ||
| Water | 2,100 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.1×103(7.9) |
| Hydrogen | 1.1×102(0.8) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.6×107(4.2×105) |
| Hydrogen | 3.1×105(2.3×103) | ||
| Cooldown time | min(Hz) | 80/70(50/60) | |
| Mounting flange | UVG-150,UFC-203 | ||
| Compressor unit | C10, C10AT, C10ES | ||
| Weight of cryopump | kg | 19 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT
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