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Product information
CRYOPUMPS (STANDARD) 16" TYPE
CRYO-U16P
FEATURES
- Suitable for medium and large-size equipments.
- High-load version of the CRYO-U16.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 5,000 |
| Hydrogen | 10,000 | ||
| Argon | 4,200 | ||
| Water | 16,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.6×103(12) |
| Hydrogen | 4.5×102(3.4) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 4.3×108(3.3×106) |
| Hydrogen | 2.4×106(1.8×104) | ||
| Cooldown time | min(Hz) | 120/110(50/60) | |
| Mounting flange | UVG-400 | ||
| Compressor unit | C30VR | ||
| Weight of cryopump | kg | 61.0 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
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