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CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22P
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds (20degrees) | Nitrogen | L/s | 11,500 |
| Hydrogen | 14,000 | ||
| Argon | 9,700 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.7×103(12.8) |
| Hydrogen | 5.0×102(3.7) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108(4.4×106) |
| Hydrogen | 6.0×106(4.5×104) | ||
| Cooldown time | min(Hz) | 180/170(50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30PVRT | ||
| Weight of cryopump | Kg | 115.0 | |
*Maintenance interval: every 16,000 hours
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