Products
Product information
Cryostat
For Wafer Cooling
FEATURES
For inspecting semiconductors in the form of wafer
With conventional cryostats, inspection of semiconductors is only possible in the form of a chip. With this model, inspection is possible in wafer state while controlling the temperature from ambient to cryogenic. This model is equipped with manipulators with which probing can be done during cooling down wafers.
DETAIL VIEW
SPECIFICATIONS
| Coldhead | HE05/UW404 | D510/SA115・SW115 | S030/SA115・SW115 |
| Ultimate Temperature | 10K以下 | 25K | 40K |
| Temperature Controllable Range | 10K to 300K ±0.2K | 25K to 300K ±0.2K | 40K to 300K ±0.2K |
| Maximum wafer size | 2 inches | ||
| Sample Holder Vibration | Less than 1μm (Floor vibration 2μm) | ||
| Accessories | Evacuation valve, Heater for temperature control, Cryogenic thermometer (for temperature control / measurement) | ||
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