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Product information
CRYOPUMPS (STANDARD) 12" TYPE
CRYO-U12H
FEATURES
- Suitable for medium- and large-size equipments.
- Resistant to thermal load. Suitable for various processes.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 4,000 |
| Hydrogen | 6,000 | ||
| Argon | 3,300 | ||
| Water | 9,500 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 2.0×103(15) |
| Hydrogen | 4.1×102(3.1) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 2.1×108(1.6×106) |
| Hydrogen | 9.8×105(7.4×103) | ||
| Cooldown time | min(Hz) | 85/75(50/60) | |
| Mounting flange | UVG-300,10BANSI | ||
| Compressor unit | C30VR | ||
| Weight of cryopump | kg | 40.0 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
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