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Speciality Cryopumps for Sputtering Process
CRYO-U8HSP
FEATURES
- Optimal for sputtering applications
- Argon capacity is 2.5 times of existing model (U8H).
- Hydrogen pumping speed is 1.2 times of existing model (U8H)
- Extended intervals between regenerations means higher tool availability.
- Multiple connections (up to 3) can be made.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speed (20℃) | Nitrogen | L/s | 1,700 |
| Hydrogen | 3,200 | ||
| Argon | 1,400 | ||
| Water | 4,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.2×103(8.9) |
| Hydrogen | 2.4×102(1.8) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 2.5×108(1.9×106) |
| Hydrogen | 1.0×106(7.8×103) | ||
| Cooldown time | min(Hz) | 110/100(50/60) | |
| Mounting flange | UVG-200,6BANSI,UFC-253 | ||
| Compressor unit | C10,C10ES | ||
| Weight | Kg | 33.2 | |
*Maintenance interval : every 16,000 hours
*Travelling base is optional.
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